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    1. Deep UV (DUV) Coating

      DUV DUV

      Key working wavelength:

      Key coating materials:

      MgF2/LaF3; Al2O3/SiO2; HfO2/SiO2

      Substrates:

      Lens, prisms, windows etc.
      Material: UV grade FS
      Typical dimension: 2mm~150mm

      193nm AR and HR coating

      AR for 193nm (T>98.5% AOI:00)

      DUV

      HR for 193nm (R>96% AOI:00)

      DUV

      HR coating for 266nm and 308nm

      HR for 266nm (R>99.5%, AOI: 00)

      DUV

      HR for 308nm (Random>99.5%, AOI: 450)

      DUV

      Laser coatings for 355nm

      Absorption Test station for 355nm

      DUV

      Absorption for HR coating at 355nm (<100ppm) internal test

      DUV

      LIDT test station for 355nm

      DUV

      LIDT for HR coating at 355nm (>4J/cm2 10ns, tested in Spica

      DUV

       

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